Instrument: Surface Profiler
Model: Alpha-Step IQ (KLA Tencor)
Location: Conte B-524
Access: provided through subscription to "sample fabrication" or "device fabrication" packages. See "USER FEES" for details.
Description: a computerized, high-sensitivity stylus-based surface profiler that features the ability to measure micro-roughness, with up to 1 Å or less resolution, over short distances, and waviness in a scan over a full surface length of 10 mm, as well as step-height in a variety of applications.